The purpose of this study is to clarify the methods of survey , the features and the precision of the surveying illustrated maps made in the late period of the early modern times in Japan, and is also to establish the method of GIS analysis using those maps. As a result, we made clear that the surveyed maps which covered the whole territory of feudal clan was made by individual technique in Tokushima clan, Kanazawa clan, and Tottori clan. In addition, about the illustrated maps of castle towns made late inthe early modern times, it was recognized that surveying precision improved . That is why we judged these surveying illustrated maps to have been proved to be old maps suitable for GIS analysis.